Technical data
Type XY Linear System LT-100
Dimensions 350 / 300/ 130 mm
Weight 15 kg
Travel X/Y 120 / 70 mm
Straightness 0.3 μm / 50 mm
Squareness 0.3 μm / 50 mm
Flatness 0.1 μm / 50 x 50 mm
Air bearing noise 0.01 μm
Positioning accuracy 0.1 μm
Repeatability 0.02 μm
