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ESI国际工程科学中国有限公司 http://www.esi-group.com.cn
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半导体材料分析软件 CFD-TOPO
CFD-TOPO,预测显微镜级别下半导体材料的传输、化学、蚀刻和沉积,能够预测电子设备的多种材料在热或等离子增强处理过程中的三维拓扑演变。

CFD-TOPO predicts the transport, chemistry, etch and deposition of semiconductor materials on the microscopic scale. It enables prediction of three-dimensional topological evolution for multiple materials during thermal or plasma enhanced fabrication of electronic devices.

CFD-TOPO can be operated as a stand-alone code, or coupled with CFD-ACE+ reactor scale models for an integrated multi-scale solution. Advanced capabilities of CFD-TOPO include:

Three-dimensional
Multiple materials and complex chemistries
Fast adaptive meshing
Fully integrated with CFD-ACE+
Fully commercialized and supported
Can be customized for a specific reactor or processes, for ease-of-use and accuracy

The salient features of the CFD-TOPO code include the following:

Two and Three Dimensional feature geometries
Level Set method for material interface tracking
Multiple Materials (arbitrary number of solids tracked)
First or Second order accuracy available in space and time
Solution-adapted grid, initialized from and adapted to material interfaces in ESI Group standard DTF format for grid and model setup
Ballistic Species Transport
Arbitrary number of gas-phase species
Direct integration of incident species fluxes at material interfaces - accelerated by using tree structure of adapted mesh
User-specified angular distribution as diffuse, cosn(q), or text table
General Surface Reaction Mechanisms
Arbitrary number of reaction steps, surface adsorbed species
Defined through CFD-GUI - same format as for reactor scale, coupled with property database for easy model definition
Yield of reactions as function of incident angle (sputtering)
Energy dependent rates and yields of reactions
Graphical Output in DTF Format
Level Set functions named by material (0 isosurface is material boundary)
Material deposition (etch) rates
Fractional coverage of surface species

参考价格:0
公司其它产品:

宽带噪音和振动实时预测、分析以及设计 AutoSEA2
通用有限元分析软件 SYSTUS
多层材料的声学特性模拟软件 NOVA
低频领域的电磁模拟软件 SYSMAGNA
铸造过程模拟软件--PROCAST
ESI国际工程科学中国有限公司
地址: 广东·科学城彩频路11号
邮编:510663
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